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NanoWatt低压等离子涂层系统 LFL-CoatML

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Low-pressure Plasma Coating System 低压等离子涂层系统

NW-CoatML

General

整体介绍

The NW-CoatML system is a medium-sized low-pressure plasma system capable of plasma

coating components using liquid precursors. The components to be treated are put in trays, which are inserted into the vacuum chamber.

NW-CoatML是一种中使用液态单体的低压的等离子处置系统。处置产品时首先将产品放在托盘上，之后把托盘放入真空腔体进行处置。

The equipment operates in batches.

该设备是依照批次处置产品的。

The system is completely comprised in a welded and powder coated rigid steel frame. The frame is closed at the bottom (with a cut-out for the vacuum pump) as well as at the sides and is open at the top. Pump as well as fully enclosed electrical cabinet are comprised within the

frame.

该系统使用全包的焊接框架结构�？蚣艿牡撞坑校ㄓ糜谧爸谜婵毡玫囊铮�，其侧面是封关的，顶部是盛开的。真空泵以及电控柜齐全蕴含在内部。

Applications

利用

Low-pressure plasma system NW-****M* (for reference only)

低压等离子系统NW-****M*（图片仅供参考）

Vacuum chamber

真空腔室

The process chamber is made of special grade aluminum with wall thickness of 30mm. All

welds are done in several passes at the interior and exterior of the chamber, which assures a long-lasting vacuum tightness for the full lifespan of the machine, which can easily be over 20 years.

真空腔体由壁厚30mm特级铝造成。全数焊接在腔室的内部和表部门屡次实现，这确保了机械的整个使用寿命（很容易超过 20 年），以及悠久真空密封性。

The vacuum chamber has approximated inner dimensions of w900*d800*h1000 mm, bringing the internal volume to approximate 0,72m³ or 720 litre.

真空腔体的内部尺寸约为长900*宽800*高1000 毫米，内部容积约为 0.72 立方米或 720 升。

The vacuum chamber contains the material to be treated (components) as well as the complete electrode setup needed to treat the material.

真空腔体内蕴含要处置的资料（组件）以及处置资料所需的齐全电极结构。

The chamber has heated walls and is fully thermally insulated.

腔体壁拥有加热职能并且齐全隔热。

The chamber is closed with a swivelling door, which is operated manually and equipped with closing handles. The door O-ring is fixed using a proprietary design, allowing an easy & hassle- free exchange. The door is heated and fully thermally insulated.

腔体门配有把手，手动进行旋转开关。腔门密封圈使用专门的设计固定，同时，也能够轻松更换。墙门也是能够加热并且齐全隔热的。

Vacuum pump

真空泵

The vacuum pump group consists of 2 pumps, both dry pumps. This type of pumps has aproven track record in the semiconductor processing industry. This water-cooled pump-combo delivers a pumping speed of 480m³/h.

真空泵由泵组组成，蕴含两个泵，均为干泵。这种泵在半导体加工领域有着很好的利用。该泵组使用水冷，可达480m³/h的抽速。

Vacuum

valves/connection

真空阀门/衔接

The chamber can be isolated from the pump through a heated and thermally insulated ISO100

angle valve.

腔体和真空泵之间通过一个能够加热且优良隔热的ISO100真空角阀。

All connections between pump, valves and chamber are made of stainless-steel grade 304, are electrically heated and thermally insulated. The pump connection is specifically designed to ensure homogeneous flow characteristics during the coating process.

泵、阀门和腔室之间的所有衔接均由 304 级不锈钢造成，管路加热使用电加热，同时做好了绝热。专门设计的泵衔接确保涂层过程中的均匀流动个性,从而保障产品处置的均匀性。

Pressure gauges

真空计

The system holds 3 independent pressure gauges:

系统蕴含3个独立的真空计

One atmosphere indicator 一个常压传感器

One Pirani gauge to control the pump cycle 一个皮拉尼真空计节造抽真空过程丈量

One heated capacitance gauge to control process pressure The pressure gauges have protecting KF16 isolation valves. 一个薄膜规节造造成真空度。所有的真空计使用KF16隔离阀门�；�。

Venting

排气

The system comes with a KF25 venting valve, equipped with a silencer/flow limiter

该系统建设一个 KF25 排气阀，建设消音器/流量限度器。

Gas delivery

气体输送

The system is equipped with 2 gas mass flow controller and 1 chamber purge line. Each line is equipped with an additional shut-off valve. The gas is delivered to every slot in the machine by means of a gas manifold.

该系统建设2个质量流量节造器和1个腔体吹扫管路。每一条气体输送管路都配有一个截止阀。气体通过气路输送至腔体。

Liquid delivery

液体输送

The system has standardly 1 LDM (Liquid Delivery Module) included. The LDM has all controls on board by its own internal PLC, which is connected to the main PLC of the system. It can easily be replaced by a spare LDM (plug-and-play).

该系统尺度蕴含 1 个 LDM（液体输送�？椋�。 LDM 的所有节造都由其自己的内部 PLC 节造，该 PLC 衔接到系统的主 PLC。它能够很容易地被备用 LDM代替（即插即用）。

The LDM allows to bring the process liquid into the right condition before supplying it as a vapor to the coating process. The LDM is connected to the process chamber by a heated and thermally insulated process line. The vapor flow gets further distributed into every process slot, by means of a proprietary heated and thermally insulated manifold.

液体输送�？槭沟ヌ逶诮肭惶褰泄ひ沾χ弥捌肴�。LDM通过加热管路与腔体进行衔接。通过相宜的加热和热绝缘管路，能够很好的将单体气化，并进一步输送到真空腔室。

Plasma electrodes

等离子电极

The plasma electrode module is an assembly of RF-powered and ground electrodes. It offers standardly 6 slots to place a tray holding the components to be treated. In case of larger/higher components, the slots can be defined larger, which will result in lesser slots.

等离子点击�？樵毯淦倒┑缂敖拥氐牡缂榧�。蕴含6个尺度插槽，搁置处置样品的托盘。对于更大的产品，能够定造更大的插槽，这就会导致插槽数量的削减。

Due to the modular setup, the machine can easily be changed over to a different geometry by switching the full plasma electrode module.

通过�？榛牡缂杓�，设备能够进行整个�？榛缂母�。

The RF-powered electrodes are temperature controlled by a recirculating heat exchanger.

射频电极由循环热互换器节造温度。

Plasma generator

等离子发生器

The system is equipped with a 2kW 13,56MHZ RF generator. The RF power is transferred by an automatic matching network to the RF-electrodes.

该系统建设了一个 2kW 13.56MHZ 射频发生器。射频功率通过自动匹配网络传输到射频电极,进行自动功率匹配。

Component loading

产品上料

Parts to be treated are positioned in a tray. These trays are equipped with wheels. The trays are inserted in between the electrodes, using a rail system inside the chamber. The rail system is integrated in the plasma electrode module.

必要处置的产品搁置在托盘中。托盘是配有轮子的。使用腔室内的导轨系统将托盘插入电极之间。导轨系统集成在等离子电极�？橹�。

Useable size of the trays (inner dimension) is approximately 700*600mm. The system can hold up to 6 trays. Maximum height for components in the standard setup is 40mm.

托盘的可用尺寸（内部尺寸）约为 700*600mm。该系统最多可包容 6 个托盘。尺度设置中可处置的最大高度为 40 毫米。

System controls

节造系统

The system is fully controlled by a PLC. Automatic processing and alarming functions are fully mastered by the PLC, independent of the HMI Operator interaction happens through the HMI.

该系统齐全由PLC节造。自动处置和报警职能齐全由 PLC 把握。操作人员通过人机界面进行设备的操作。

The HMI is a 17” industrial touch screen PC and offers a very comprehensive and intuitive interface with the user. Depending on the allocated user-level, it allows to run the machine in manual or automatic mode, program process recipes or alter system settings. The HMI is also taking care of the optional historical data logging with exporting functions and standardly allows for remote access support over the internet.

HMI 是一个 17 英寸的工业触摸屏 PC，为用户提供了一个极度全面和直观的界面。用户进入分歧的级别，能够在手动或自动模式下运行机械、建稿配方或更改系统设置。 HMI 还通过导出职能导出汗青数据纪录，并允许通过 Internet 进行远程接见支持。

Status feedback is also provided through a 5-fold LED signal lamp and buzzer

设备运行状态能够通过LED灯和蜂鸣器进行急剧把握。

Certification

认证

The equipment is CE certified

设备通过CE认证

Warranty

质保

The warranty period is 12 months

保建期为12个月

Options

选件

Several options available: extra gas lines, extra sets of trays, frame top cover, manual loading

trolley, ERP/MES integration, automatic loading

提供多种选择：额表的气体管路、额表的托盘组、框架顶盖、手动装载手推车, ERP/MES 集成, 自动装载装置

Characteristics 设备参数：

Electrical

电力供给

3*400V+N+PE at 60A

Compressed air

压缩空气

6-8 bar

Clean and dried air according class4 specification of ISO standard 8573.1

凭据ISO 8573.1尺度

Cooling water

冷却水

20°C

20 liter/minute at 2 bar 2bar压力情况下20升/分钟

Clear & soft water, free of particles 洁净水，没有粒子

Cooling power 6kW 冷却功率6kW

Process gas

工艺气体

Purity>99,95% 纯度＞99.95%

Pressure : 1-2 bar 压力1-2bar

Exhaust

尾气排放

Direct tube to the outside through KF40 flange or hose inner diameter 38mm

通过KF40法兰或内径38mm软管衔接

Connectivity

网络衔接

(Proxy-free) internet line 互联网

Dimensions

设备尺寸

2200*16000*1920 (+250 signal light) mm (l*w*h)

Weight

设备重量

2000 kg

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NanoWatt低压等离子涂层系统 LFL-CoatML

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